Application Description

Many sensing devices, including inertial and environmental sensors, can be miniaturized and operated with minimal power consumption thanks to micro-electromechanical systems (MEMS) technology. From the design board to the realization of the sensor, an essential step is the characterization of the behavior of the MEMS structure. Application-specific analog circuitry (ASIC) is often developed for this purpose, but this approach makes the iterative sensor development process cumbersome and time-consuming. A fast and comprehensive characterization method for MEMS devices is thus essential.